• MKS E28B-31778 0.1 Torr Vacuum Pressure Controller - MKS
  • MKS E28B-31778 0.1 Torr Vacuum Pressure Controller - MKS
  • MKS E28B-31778 0.1 Torr Vacuum Pressure Controller - MKS
  • MKS E28B-31778 0.1 Torr Vacuum Pressure Controller - MKS
  • MKS E28B-31778 0.1 Torr Vacuum Pressure Controller - MKS
1 5

MKS

MKS E28B-31778 0.1 Torr Vacuum Pressure Controller Professional e-commerce SEO optimization tool

MKS E28B-31778 0.1 Torr Vacuum Pressure Controller Professional e-commerce SEO optimization tool

$2,080.25 USD
$2,080.25 USD $2,080.25 USD
Sale Sold out
Shipping calculated at checkout.
MPN E28B-31778
Minimum Pressure Not specified
Product Type Vacuum Pressure Controller
Torr Setting 0.1 Torr
Output Signal Not specified
Maximum Pressure Not specified
View full details

  • step 1: Quote Or Shop Now

    You can place an order directly or contact us via email and whatsapp for a quote

  • step 2: Confirmation and delivery

    After placing an order, we will contact you by email or WhatsApp within three days to provide photos and videos of the product for confirmation and then ship it.

Customers are saying

4.99 ★ (1084)
Verified

Description


MKS E28B-31778 0.1 Torr Vacuum Pressure Controller Professional e-commerce SEO optimization tool

MKS E28B-31778 0.1 Torr Vacuum Pressure Controller offers precise automation control for industrial applications with reliable performance and robust design.

MKS E28B-31778 0.1 Torr Vacuum Pressure Controller is a professional-grade automation controller designed for use in industrial automation and control systems. It is optimized for use with Programmable Logic Controllers (PLC) and automation systems, providing precise control over vacuum and pressure applications. The controller features a robust design and reliable performance, making it suitable for demanding industrial environments. It is widely used in manufacturing, chemical processing, and other industries where precise pressure and vacuum control is essential.

Engineer's Quick Brief

  • MKS E28B-31778 is a high-precision 0.1 Torr absolute vacuum pressure controller designed for semiconductor and thin-film process environments.
  • Baratron capacitance manometer technology provides highly stable low-pressure measurement with minimal drift in plasma etch and deposition systems.
  • Optimized for CVD, PVD, plasma etch, vacuum coating, and process chamber pressure regulation where sub-Torr accuracy is critical.

SEO Introduction

The MKS E28B-31778 is a professional-grade vacuum pressure controller and heated capacitance manometer engineered for ultra-low pressure process control applications. Operating at a 0.1 Torr full-scale range, this MKS Baratron-based sensor delivers stable and repeatable vacuum measurement performance in semiconductor fabrication, plasma etching, vacuum deposition, and analytical instrumentation systems.

Common industry search terms associated with this model include: 0.1 Torr pressure transducer, MKS Baratron gauge, vacuum capacitance manometer, etch process pressure controller, and high-accuracy vacuum sensor.

Technical Specifications

Parameter Specification
Manufacturer MKS Instruments
Model E28B-31778
Technology Baratron Heated Capacitance Manometer
Measurement Type Absolute Pressure Measurement
Full Scale Pressure Range 0.1 Torr
Sensor Heating 100°C Controlled Heated Sensor
Typical Accuracy 0.5% of Reading (<1 Torr Range)
Resolution 0.001% of Full Scale
Output Signal 0-10 VDC Analog Output
Electrical Connector 15-pin D-Sub
Pressure Fitting 8 VCR Female
Exposed Wetted Material Inconel®
Operating Ambient Temperature 15°C to 50°C
Warm-Up Time Approximately 4 Hours for Sub-Torr Stability
Overpressure Limit 45 psia or 120% FS
Power Requirement ±15 VDC ±5% @ 0.6A Max
Calibration Orientation Horizontal
Compliance CE
Typical Applications Semiconductor Etch, CVD, PVD, Vacuum Process Chambers

Application Matrix

Industry Application Engineering Value
Semiconductor Manufacturing Etch Chamber Pressure Monitoring Maintains ultra-stable low-pressure process conditions
Vacuum Coating PVD/CVD Pressure Control Improves deposition consistency and film quality
Analytical Instrumentation Vacuum System Feedback Control Provides high-accuracy closed-loop regulation
Research Laboratories Ultra-Low Pressure Measurement Enables repeatable vacuum experiment conditions
Industrial Plasma Systems Reactive Gas Process Stabilization Minimizes pressure drift during plasma operation

Koeed Vacuum Pressure Conversion & Analog Output Calculator

Pressure in Pascal (Pa): 0
Pressure in mbar: 0
Estimated Analog Output (0-10V): 0
The analog output estimation assumes a linear 0-10V scaling across the 0.1 Torr full-scale measurement range.

Troubleshooting & FAQ

Why does the pressure reading drift during startup?

The heated Baratron sensor requires thermal stabilization. For sub-Torr models such as the E28B-31778, a warm-up period of approximately 4 hours is commonly required to achieve specified accuracy.

What causes unstable readings in plasma etch systems?

Contamination buildup, improper grounding, RF interference, or process gas condensation can introduce pressure instability. Heated capacitance manometers reduce this effect by maintaining elevated sensor temperature.

Can the controller be integrated with PLC or vacuum automation systems?

Yes. The analog 0-10V output allows integration with PLC analog input modules, vacuum controllers, and closed-loop process control systems.

How is the analog voltage related to pressure?

The output signal is typically linear across the full-scale range. For a 0.1 Torr model, 5V corresponds approximately to 0.05 Torr.

Why is sensor heating important?

Maintaining the sensor at elevated temperature minimizes condensation and chemical deposition on the diaphragm, improving long-term stability in semiconductor etch processes.

Cross-Reference & Selection

Cross-Reference Guide

  • MKS E28F Series Heated Baratron Manometers
  • MKS E28H Series Heated Capacitance Manometers
  • MKS 628 Series Baratron Pressure Transducers
  • MKS 626 Series Absolute Capacitance Manometers
  • Compatible with legacy E28B and E28D platform installations

About Koeed Automation

Expert Supply Solutions for Global Industrial Electronics

At Koeed.com, we are professional architects of the industrial electronics supply chain. We specialize in providing high-performance PLCs, HMIs, Servo Motors, Drives, and Converters to ensure that modern manufacturing operations remain efficient, reliable, and future-proof in 2026’s competitive landscape.

🛡️ Certified Quality

We source only 100% authentic industrial hardware from global category leaders. Every component undergoes a rigorous verification process to meet Industry 4.0 reliability standards.

⚙️ Engineering Domain

Our experts provide more than just parts; we offer technical insight. We assist in complex product selection and compatibility audits for both legacy system upgrades and new installations.

🌐 Rapid Global Logistics

Time is money in industrial automation. Our optimized supply network ensures that critical components reach your facility quickly, significantly reducing unplanned downtime and operational loss.

Strategic Global Portfolio: Siemens, Omron, FANUC, Schneider Electric, Mitsubishi, Yaskawa, Allen-Bradley, and other elite industrial brands.

Supporting your vision for a smarter, more efficient industrial future.

Alternative Names


  • MKS E28B-31778 0.1 Torr Vacuum Controller
  • MKS E28B-31778 0.1 Torr Pressure Controller

Special Reminder

Important

If you have any questions about product information and prices, please feel free to contact us by email or WhatsApp. We will respond quickly.

  • Business Days Only (Monday through Saturday)
  • It takes up to 10 days from the time of ordering (excluding Saturdays and Sundays) to the time of delivery to your designated location. Worldwide delivery.
  • Within 3 days after placing the order, we will send you photos and videos of the product via email or WhatsApp for confirmation

International shipping - items may be subject to customs processing depending on the item's customs value.
Sellers declare the item's customs value and must comply with customs declaration laws.
As the buyer, you should be aware of possible:

  • Delays from customs inspection.
  • Import duties and taxes which buyers must pay.
  • Brokerage fees payable at the point of delivery.

Shipping Policy

Global Delivery

We ship to customers all over the world. Our primary logistics providers are DHL, UPS, TNT, FedEx, and EMS.

Processing Time

All orders are processed within 72 hours of purchase. Please note that this applies to business days only.

Shipping Rates & Delivery Estimates

Shipping charges for your order will be calculated and displayed at checkout. Delivery estimates are within 7-14 days. Please note that these shipping times are only estimates and unfortunately, cannot be guaranteed.

Shipment Confirmation & Order Tracking

You will receive a Shipment Confirmation email once your order has shipped containing your tracking number(s). The tracking number will be active within 24 hours.

Customs, Duties, and Taxes

Please note, international shipping services do vary from country to country. To find out the exact services that are available, please put in your full address at checkout. Shipping internationally does mean that you may be required to pay customs and import taxes. All international customers are responsible for the customs rates within their own country. For further information, we recommend contacting your local customs office.

Damages

We take every reasonable precaution to ensure that products are not damaged. If the item is damaged in transit, please immediately contact us. We are not liable for any products damaged or lost during shipping. If you received your order damaged, please contact the shipment carrier to file a claim. Please save all packaging materials and damaged goods before filing a claim.

Force Majeure

When encountering with force majeure, the processing of orders will be delayed. Nevertheless, it is ensured that your order will be processed in a fast manner when weather permits.

Address Verification

Please verify you have the correct shipping address on your order PRIOR to making payment as this is the address we will ship to.

Return Policy

For more information, visit our Return Policy page.

International shipping - items may be subject to customs processing depending on the item's customs value.

Sellers declare the item's customs value and must comply with customs declaration laws.
As the buyer, you should be aware of possible:
• Delays from customs inspection.
• Import duties and taxes which buyers must pay.
• Brokerage fees payable at the point of delivery.

Contact Us

If you have any questions about your order, please contact us at moritta@koeed.com.

Return Policy

Return and Refund Policy

We want you to be completely satisfied with your purchase on our store. If for any reason you are not entirely satisfied, we're here to help!

Returns

You have a generous 30 calendar days to return an item from the date you received it. To be eligible for a return, ensure the item is in its original, unworn, and unused condition with tags and packaging intact. Retain your receipt or proof of purchase for eligibility. Please note that certain items are non-returnable like perishables, custom products, personal care goods, hazardous materials, flammable liquids, and gases. Reach out for clarifications on specific items.

Return Process

Commence the return process by reaching out to us at moritta@koeed.com. Upon approval, we will furnish you with a return shipping label and detailed instructions for dispatching your package. Unnotified returns will not be accepted.

Damages and Issues

Kindly review your order upon delivery. Notify us promptly if it arrives defective, damaged, or incorrect. We will address the matter swiftly.

Exchanges

Facilitate a swift exchange by returning the original item once approved and making a new purchase.

EU 14-Day Cooling Off Period

EU-bound shipments allow a 14-day cancellation or return period without justification. Conditions mirror standard returns.

Refunds

Upon receiving and inspecting your return, we’ll inform you of the refund status. Approved refunds are automatically processed within 10 business days via the initial payment method. Allow time for financial institutions to finalize the refund. For delays exceeding 15 business days post-approval, contact us at moritta@koeed.com.

Shipping

You will be responsible for paying for your own shipping costs for returning your item. Shipping costs are non-refundable. If you receive a refund, the cost of return shipping will be deducted from your refund.

Contact Us

If you have any questions on how to return your item to us, feel free to contact us at moritta@koeed.com.

Related manufacturers